半導体用高速熱処理用ゾーンコントロール誘導加熱装置 A Zone-Control Induction Heating (ZCIH) System for Semiconductor Processing
This paper proposes a new induction heating technology capable of controlling a precise exothermic distribution, which is named as "zone-control induction heating (ZCIH)." The ZCIH system consists of two or more sets of a high-frequency inverter unit and a work coil. The inverter units control the phase angle of the coil current to be in phase with each other. The ZCIH has capability of operation with the mutual inductance, and enables to locate the coils as close as possible. As a result, the ZCIH technology makes it possible to achieve rapid heating performance with extremely precise exothermic distribution. This paper presents experimental results of a 150-kW six-zone ZCIH system for semiconductor heat processing.
- 電気学会論文誌. D, 産業応用部門誌 = The transactions of the Institute of Electrical Engineers of Japan. D, A publication of Industry Applications Society
電気学会論文誌. D, 産業応用部門誌 = The transactions of the Institute of Electrical Engineers of Japan. D, A publication of Industry Applications Society 128(3), 296-302, 2008-03-01
The Institute of Electrical Engineers of Japan