Characteristic of a Plastic Film Thickness Measuring System Using a Slit Beam X-ray

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The employment of plastic films has increased rapidly with use in flat-panel displays, secondary cells, and electronic devices, in order to make such devices lighter, thinner, and denser. Conventionally, the X-ray thickness measuring system for plastic films usually employs an X-ray spot beam of 10-20mm in diameter. However, this beam area is too large to measure some films, such as small size film components used in electronic devices. Therefore, it is necessary to improve the resolution ability. In the present study for solving this problem, the authors describe a new measuring system using a slit beam X-ray of 0.4mm to accurately measure the thickness of plastic films. The use of this system can drastically improve the resolution in the measurement of plastic film thickness, resulting in an accuracy of ±2.7% or less, for the sample film by the superposition of a polypropylene tape (PP, thickness: 30<i>μ</i>m, width: 1or 20mm) over a PP film (thickness: 30<i>μ</i>m).

収録刊行物

  • 電気学会論文誌. D, 産業応用部門誌 = The transactions of the Institute of Electrical Engineers of Japan. D, A publication of Industry Applications Society  

    電気学会論文誌. D, 産業応用部門誌 = The transactions of the Institute of Electrical Engineers of Japan. D, A publication of Industry Applications Society 128(5), 601-606, 2008-05-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10021134256
  • NII書誌ID(NCID)
    AN10012320
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    09136339
  • NDL 記事登録ID
    9495942
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-1608
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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