マイクロフローセンサと制御回路のSPICEを用いた電気-熱 連成解析 [in Japanese] Coupled Electro-Thermal Analysis of the Micro Flow Sensor with Control Circuit using SPICE [in Japanese]
Access this Article
Search this Article
This paper reports an electro-thermal analysis of two-element Micro Flow Sensor (MFS). The measurement principle is based on temperature difference between upstream and downstream part of electrically connected heating-sensing elements. The two-heater MFS, the thermal fluid flow around MFS and the electric circuit were modeled together using a commercial general-purpose circuit simulator based on SPICE (Simulation Program with Integrated Circuit Emphasis). The model has a partial three-dimensional lumped thermal network model involved in a two-dimensional one. Two-dimensional laminar Poiseuille channel flow was assumed as the flow field in the model, and the forced convective heat transfer was calculated by energy balance at each node in the fluid flow. The tendency on the sensor characteristics was in good agreement between the simulation and experiment.
- The Journal of the Institute of Electrical Engineers of Japan
The Journal of the Institute of Electrical Engineers of Japan 128(2), 53-58, 2008-02-01
The Institute of Electrical Engineers of Japan