Development of an Electromagnetically Driven Optical MEMS Mirror with Functions of Z-Axis Vibration and X, Y Bi-Directional Tilting, and an Application to Low Coherent Optical Interferometer

• Watanabe Yoshiyuki

  Yamagata Research Institute of Technology

• Abe Yutaka

  Yamagata Research Institute of Technology

• Iwamatsu Shinnosuke

  Yamagata Research Institute of Technology

• Mitsui Toshiaki

  Yamagata Research Institute of Technology

• Takahashi Yoshiyuki

  Yamagata Research Institute of Technology

• Sato Toshiyuki

  Yamagata Research Institute of Technology

抄録

This paper presents development of an optical MEMS mirror device and an application to low coherence interferometry. This device can vibrate ±0.9μm along Z-axis under resonant frequency (5.24Vpp, 28.48kHz) for lock-in detection, and can tilt to X, Y bi-direction (Optical angle X:±10.6°/±10mA, Y:±5.2°/±10mA) for 2-D scanning and optical axis alignment by electromagnetic force between planar coils and a permanent magnet. In addition, developed MEMS mirror is embedded to a time-domain low coherent interferometer with a super luminescent diode (λc: 832nm, Δλ: 14.7nm) for optical axis alignment and lock-in detection, and the thickness and refractive index of a glass plate have been evaluated with low noise.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 128 (3), 70-74, 2008

  一般社団法人 電気学会

キーワード

• MEMS mirror
• electromagnetically driven
• Z-axis vibration
• X
• Y bi-directional tilting
• Low Coherence Interferometry
• OCT

詳細情報

• CRID: 1390001204459969664
• NII論文ID: 10021135009
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.128.70
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 9400666
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9400666
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas/128/3/128_3_70/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可