酸化物半導体厚膜を用いたTVOCセンサの開発 Development of Oxide Semiconductor Thick Film Gas Sensor for the Detection of Total Volatile Organic Compounds
After an amendment of Building Standards Law in 2003, the installation of the ventilator is compulsory in the newly built house. Because many persons suffer from indoor-air pollutants caused by the volatile organic compounds (VOCs). The final purpose of this research is to develop the gas sensor which can monitor the gross weight of VOC gases indoors and then to control the ventilator efficiently using the sensor. In order to develop the sensor which detects total VOC, the responses of 4 oxide semiconductor materials to 37 kinds of VOC gases were studied. Those materials showed small responses to halogenated and aliphatic hydrocarbon gases. As a result of improving the response to these gases, among 4 metal oxides examined, SnO<sub>2</sub> and WO<sub>3</sub> showed high sensitivities by the addition of Pd and Pt. The sensing properties of SnO<sub>2</sub> for halogenated hydrocarbon gases were extremely improved by the addition of 0.5wt% Pd. Also, the sensing properties of SnO<sub>2</sub> for aliphatic hydrocarbon gases were improved by the addition of 0.7wt% Pt. In addition, the doubly promoted element, Pt(0.5wt%)-Pd(0.5wt%)-SnO<sub>2</sub>, showed a large response to many kinds of VOC gases examined.
- 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 128(4), 125-130, 2008-04-01
The Institute of Electrical Engineers of Japan