Preparation of macroporous semiconductor gas sensors and their odur sensing properties (特集 VOCガスのセンシング) Preparation of Macroporous Semiconductor Gas Sensors and Their Odur Sensing Properties
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Macroporous (mp-) oxide films (SnO<sub>2</sub>, WO<sub>3</sub> and In<sub>2</sub>O<sub>3</sub>) were fabricated by a modified sol-gel technique employing polymethylmethacrylate (PMMA) microspheres as a template. NH<sub>3</sub> responses of all the mp-oxide films prepared were much lower than those of reference (R-) oxide films fabricated by screen printing of the sol-gel driven powder, probably due to less reactivity of NH<sub>3</sub> originating from their macroporous structure. On the other hand, mp-oxide films, especially mp-In<sub>2</sub>O<sub>3</sub>, showed much larger H<sub>2</sub>S response than R-oxide films. Furthermore, the addition of CuO was quite effective for improving the H<sub>2</sub>S response and the recovery speed of mp-In<sub>2</sub>O<sub>3</sub>.
- The Journal of the Institute of Electrical Engineers of Japan
The Journal of the Institute of Electrical Engineers of Japan 128(4), 141-144, 2008-04-01
The Institute of Electrical Engineers of Japan