Preparation of macroporous semiconductor gas sensors and their odur sensing properties (特集 VOCガスのセンシング) Preparation of Macroporous Semiconductor Gas Sensors and Their Odur Sensing Properties

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Macroporous (mp-) oxide films (SnO<sub>2</sub>, WO<sub>3</sub> and In<sub>2</sub>O<sub>3</sub>) were fabricated by a modified sol-gel technique employing polymethylmethacrylate (PMMA) microspheres as a template. NH<sub>3</sub> responses of all the mp-oxide films prepared were much lower than those of reference (R-) oxide films fabricated by screen printing of the sol-gel driven powder, probably due to less reactivity of NH<sub>3</sub> originating from their macroporous structure. On the other hand, mp-oxide films, especially mp-In<sub>2</sub>O<sub>3</sub>, showed much larger H<sub>2</sub>S response than R-oxide films. Furthermore, the addition of CuO was quite effective for improving the H<sub>2</sub>S response and the recovery speed of mp-In<sub>2</sub>O<sub>3</sub>.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 128(4), 141-144, 2008-04-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10021135129
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    9452185
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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