Preparation of Macroporous Semiconductor Gas Sensors and Their Odur Sensing Properties

• Nonaka Shuhei

  Graduate School of Science and Technology

• Hyodo Takeo

  Faculty of Engineering, Nagasaki University

• Shimizu Yasuhiro

  Faculty of Engineering, Nagasaki University

• Egashira Makoto

  Faculty of Engineering, Nagasaki University

抄録

Macroporous (mp-) oxide films (SnO₂, WO₃ and In₂O₃) were fabricated by a modified sol-gel technique employing polymethylmethacrylate (PMMA) microspheres as a template. NH₃ responses of all the mp-oxide films prepared were much lower than those of reference (R-) oxide films fabricated by screen printing of the sol-gel driven powder, probably due to less reactivity of NH₃ originating from their macroporous structure. On the other hand, mp-oxide films, especially mp-In₂O₃, showed much larger H₂S response than R-oxide films. Furthermore, the addition of CuO was quite effective for improving the H₂S response and the recovery speed of mp-In₂O₃.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 128 (4), 141-144, 2008

  一般社団法人 電気学会

キーワード

• semiconductor metal oxides
• gas sensors
• macropore
• odor
• NH₃
• H₂S

詳細情報

• CRID: 1390001204460894848
• NII論文ID: 10021135129
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.128.141
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 9452185
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9452185
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas/128/4/128_4_141/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• 抄録ライセンスフラグ: 使用不可