Detection of dilute aromatic VOCs using WO3 thin film sensors equipped with Au interdigitated microelectrode (特集 VOCガスのセンシング) Detection of Dilute Aromatic VOCs Using WO_3 Thin Film Sensors Equipped with Au Interdigitated Microelectrode

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Sensing properties to dilute aromatic VOCs (toluene, xylene, ethylbenzene, and styrene) have been investigated for the WO<sub>3</sub> thin film microsensors equipped with Au interdigitated microelectrode. The sensor response (S=Ra/Rg) was increased with decreasing teeth distance of interdigitated electrode in the range of 2-5 μm. The WO<sub>3</sub> microsensor with 2 μm interdigitated electorde showed the highest sensor response to dilute aromatic VOCs at 500 °C. The WO<sub>3</sub> microsensor with 2 μm interdigitated electrode exhibited the sufficient sensor response (S>3) to 0.01 ppm aromatic VOCs, particularly high sensor response (S=6) to 0.01 ppm xylene, at 500 °C with the excellent response-recovery characteristics. This behavior suggests that the WO<sub>3</sub> thin film microsensors equipped with Au interdigitated microelectrode can be used as a high sensitivity aromatic VOC sensor.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 128(4), 145-148, 2008-04-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10021135143
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    9452210
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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