Detection of Formaldehyde Using a Pt/γ-Al_2O_3-Based Adsorption/Combustion-Type Sensor
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An adsorption/combustion-type gas sensor employing Pt/γ-Al<sub>2</sub>O<sub>3</sub> with low heat capacity was fabricated by MEMS process on a silicon substrate. The sensor was driven by pulse heating between 25°C and 200°C. The sensor showed a large response peak to formaldehyde due to its combustion upon pulse heating during a period of 0.4 s after room temperature adsorption for 20 s. The sensor detected formaldehyde of any concentration in the range of 40-400 ppb, and interference from high boiling point compounds was less important.
- The Journal of the Institute of Electrical Engineers of Japan
The Journal of the Institute of Electrical Engineers of Japan 128(4), 149-150, 2008-04-01
The Institute of Electrical Engineers of Japan