Fabrication of microcoils using x-ray lithography and metallization
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- Noda Daiji
- Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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- Matsumoto Yoshifumi
- Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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- Setomoto Masaru
- Laboratory of Advanced Science and Technology for Industry, University of Hyogo
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- Hattori Tadashi
- Laboratory of Advanced Science and Technology for Industry, University of Hyogo
書誌事項
- タイトル別名
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- Fabrication of Microcoils Using X-ray Lithography and Metallizaiton
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Coils and actuators are finding an increasing number of uses in various fields. The demand for microcoils and microactuators is increasing due to the recent progress in downsizing and the increasing sophistication of various industrial products. Actuators account for a large percentage of the total volume and weight of many product compared with other parts and devices that are typically included. However, coils are unsuitable for miniaturization because of their structure. Therefore, we have proposed the use of high aspect ratio microcoils in order to reduce their size and to increase their performance. To realize microcoils such as these, we have developed a fabrication process based on three-dimensional deep X-ray lithography and metallization techniques. We have also used a dipping method in order to obtain thick layers of photoresist on metal bar with diameters of 1 mm. In this paper, we have fabricated microcoils with 10 μm line widths, 20 μm pitch, and aspect ratio of over 5. There is every expectation that high performance microcoils with high aspect ratio coil lines could be manufactured by this process, despite their miniature size.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 128 (5), 181-185, 2008
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679439104896
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- NII論文ID
- 10021135249
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 9496117
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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