Fabrication and Normal/Shear Stress Responses of Tactile Sensors of Polymer/Si Cantilevers Embedded in PDMS and Urethane Gel Elastomers

• Huang Yu Ming

  Department of Engineering Science, Osaka University

• Sohgawa Masayuki

  Department of Engineering Science, Osaka University

• Yamashita Kaoru

  Department of Engineering Science, Osaka University Graduate School of Science and Technology, Kyoto Insitute of technology

• Kanashima Takeshi

  Department of Engineering Science, Osaka University

• Okuyama Masanori

  Department of Engineering Science, Osaka University

• Noda Minoru

  Department of Engineering Science, Osaka University Graduate School of Science and Technology, Kyoto Insitute of technology

• Noma Haruo

  ATR Knowledge Science Labs

抄録

Cantilever-type tactile sensors of silicon-polymer beam structures were fabricated by surface micromachining and covering with elastomers. Two kinds of elastomers with different Young's modulus PDMS and urethane gel have been used to control deflection of the cantilevers and adjust the sensitivity cantilever-type tactile sensors. The resistance change of the sensor with PDMS has linear dependence on normal and shear stresses, but that of the sensor with urethane gel is nonliner to normal and shear stresses. However, the sensitivity of urethane gel type sensor is about 30 times larger than PDMS type sensor.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 128 (5), 193-197, 2008

  一般社団法人 電気学会

キーワード

• tactile sensor
• cantilever
• elastomer
• strain gauge

詳細情報

• CRID: 1390001204460663296
• NII論文ID: 10021135275
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.128.193
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 9496157
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9496157
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas/128/5/128_5_193/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可