Design and Simulation of a Novel 3-DOF MEMS Convective Gyroscope
This paper reports on the design and simulation of a novel MEMS based convective gyroscope which can independently detect three components of angular rate. The sensor was designed with standard bulk MEMS technology. The 3D jet flow was simulated in the confined space formed by MEMS compatible laminated-structures. The configuration of the sensor consists of a PZT diaphragm, caps, in-plane tungsten hotwires located on the surface of a 0.4mm-thick circular silicon frame with diameter of 10mm. The simulated scale factors of the sensor are SF<sub>z</sub> = 0.83 μV/<sup>o</sup>/s, SF<sub>x</sub> = SF<sub>y</sub> = 3.10 μV/<sup>o</sup>/s. In measurement application, the 3DOF gyro eliminates the sensor-to-sensor misalignment, and therefore provides accurate measurement with small cross-sensitivity. The sensor also has high shock resistance since no proof mass is used.
- 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 128(5), 219-224, 2008-05-01
The Institute of Electrical Engineers of Japan