Design and Simulation of a Novel 3-DOF MEMS Convective Gyroscope

• Dau Van Thanh

  Ritsumeikan University, Biwako-Kusatsu Campus

• Dinh Thien Xuan

  Ritsumeikan University, Biwako-Kusatsu Campus

• Dao Dzung Viet

  Ritsumeikan University, Biwako-Kusatsu Campus

• Sugiyama Susumu

  Ritsumeikan University, Biwako-Kusatsu Campus

抄録

This paper reports on the design and simulation of a novel MEMS based convective gyroscope which can independently detect three components of angular rate. The sensor was designed with standard bulk MEMS technology. The 3D jet flow was simulated in the confined space formed by MEMS compatible laminated-structures. The configuration of the sensor consists of a PZT diaphragm, caps, in-plane tungsten hotwires located on the surface of a 0.4mm-thick circular silicon frame with diameter of 10mm. The simulated scale factors of the sensor are SF_z = 0.83 μV/^o/s, SF_x = SF_y = 3.10 μV/^o/s. In measurement application, the 3DOF gyro eliminates the sensor-to-sensor misalignment, and therefore provides accurate measurement with small cross-sensitivity. The sensor also has high shock resistance since no proof mass is used.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 128 (5), 219-224, 2008

  一般社団法人 電気学会

キーワード

• hotwire
• convective gyroscope
• 3-DOF

詳細情報

• CRID: 1390282679437372416
• NII論文ID: 10021135342
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.128.219
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 9496201
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9496201
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas/128/5/128_5_219/_pdf
• 本文言語コード: en
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可