Design and Simulation of a Novel 3-DOF MEMS Convective Gyroscope

• Dau Van Thanh

  Ritsumeikan University, Biwako-Kusatsu Campus

• Dinh Thien Xuan

  Ritsumeikan University, Biwako-Kusatsu Campus

• Dao Dzung Viet

  Ritsumeikan University, Biwako-Kusatsu Campus

• Sugiyama Susumu

  Ritsumeikan University, Biwako-Kusatsu Campus

Abstract

This paper reports on the design and simulation of a novel MEMS based convective gyroscope which can independently detect three components of angular rate. The sensor was designed with standard bulk MEMS technology. The 3D jet flow was simulated in the confined space formed by MEMS compatible laminated-structures. The configuration of the sensor consists of a PZT diaphragm, caps, in-plane tungsten hotwires located on the surface of a 0.4mm-thick circular silicon frame with diameter of 10mm. The simulated scale factors of the sensor are SF_z = 0.83 μV/^o/s, SF_x = SF_y = 3.10 μV/^o/s. In measurement application, the 3DOF gyro eliminates the sensor-to-sensor misalignment, and therefore provides accurate measurement with small cross-sensitivity. The sensor also has high shock resistance since no proof mass is used.

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 128 (5), 219-224, 2008

  The Institute of Electrical Engineers of Japan

Keywords

• hotwire
• convective gyroscope
• 3-DOF

Details

• CRID: 1390282679437372416
• NII Article ID: 10021135342
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.128.219
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 9496201
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9496201
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas/128/5/128_5_219/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed