Development of a 3-DOF Micro Accelerometer with Wireless Readout

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This paper describes the design, simulation and fabrication of a 3-DOF (degree of freedom) micro accelerometer with wireless readout system. The fabricated accelerometer has dimensions of 1000μm×1000μm×500μm (Length×Width×Thickness) and can detect three components of linear acceleration simultaneously. The sensitivities to X-axis, Y-axis and Z-axis are 30μV/g, 30μV/g and 23μV/g, respectively. A three input-channels wireless transceiver system has been developed and integrated with the sensing element to form a sensor node. The antenna has been designed to transmit the signal from sensor node to a server at a communication frequency of 2.4GHz over a distance of 20m. Three output signals, i.e. X-axis, Y-axis and Z-axis, from the accelerometer are transmitted to the server by time division multiplexing protocol. This allows our wireless sensor system to detect three components of acceleration independently.

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  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 128(5), 235-239, 2008-05-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10021135373
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    9496225
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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