Noise and Frequency Analyses of a Miniaturized 3-DOF Accelerometer Utilizing Silicon Nanowire Piezoresistors
収録刊行物
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- The 3^<rd> Inter. Conf. on Sensors, Vienna Univ. of Technology, Vienna, Austria, 2004-10
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The 3^<rd> Inter. Conf. on Sensors, Vienna Univ. of Technology, Vienna, Austria, 2004-10 2004
IEEE Sensors Council