Application of Vertical Comb-Drive MEMS Mirror for a Phase Shift Device

• Inoue Daisuke

  Department of I. M. S. E., Kagawa University

• Oohira Fumikazu

  Department of I. M. S. E., Kagawa University

• Yamamoto Kazuya

  Department of I. M. S. E., Kagawa University

• Kondo Masahiro

  Department of I. M. S. E., Kagawa University

• Harada Takaki

  Department of I. M. S. E., Kagawa University

• Ishimaru Ichirou

  Department of I. M. S. E., Kagawa University

• Hashiguchi Gen

  Research Institute of Electronics Shizuoka University

• Hosogi Maho

  Department of I. M. S. E., Kagawa University

Abstract

We have proposed a vertical comb-drive MEMS mirror which can be applied for a spectrometer with a phase-shifting method, and fabricated the mirror device using the micro fabrication technology. The configuration of the MEMS mirror was designed with three vertical electrostatic comb-drive actuators and hinges at the periphery of the mirror. In the proposed spectrometer, the phase of the light which is reflected at the movable mirror is changed, and the interferogram is obtained by the movable mirror which is driven precisely. We evaluated the moving characteristics of the fabricated MEMS mirror and confirmed that the MEMS mirror could be driven vertically to about 23μm and also could be tilted. Using this MEMS mirror, we configured the spectrometer with a source of monochromatic light (λ= 405 nm), and evaluated the spectroscopic characteristic in principle. Then, we have confirmed that the fabricated MEMS mirror can be applied to the spectrometer with the phase-shifting method.

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 128 (6), 261-265, 2008

  The Institute of Electrical Engineers of Japan

Keywords

• vertical comb-drive actuator
• spectrum sensing
• phase shift
• MEMS
• SOI

Details

• CRID: 1390282679438502272
• NII Article ID: 10021135421
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.128.261
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 9532697
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9532697
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas/128/6/128_6_261/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed