An air-bearing displacement sensor with a micro-ball stylus for profile measurement of 3D micro-structured surfaces

• YOSHIKAWA Y.

収録刊行物

• Proc. of the 35th Int. MATADOR Conference, 2007

  Proc. of the 35th Int. MATADOR Conference, 2007 2007

詳細情報

• CRID: 1574231875314285056
• NII論文ID: 10021136730
• データソース種別:
  • CiNii Articles