Film Actuators : Planar, Electrostatic Surface-Drive Actuators
Journal
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- Proc. IEEE MEMS, Nara 1991
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Proc. IEEE MEMS, Nara 1991 1991
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Details 詳細情報について
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- CRID
- 1571698600523670144
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- NII Article ID
- 10021138790
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- Data Source
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- CiNii Articles