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- Miya Hironobu
- Semiconductor Equipment Division, Hitachi Kokusai Electric Inc.
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- Wang Jie
- Semiconductor Equipment Division, Hitachi Kokusai Electric Inc.
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The electrochemical behaviors of coating films on the steel and Ni–Cr–Mo alloy (Hastelloy) were investigated to obtain fundamental data on their corrosion resistance characteristics. We compared several types of materials and coating layers. SUS316, Hastelloy, DLC (Diamond-like carbon) on SUS316 and DLC on Hastelloy samples showed stable potential-time characteristics. F2 processing SUS316 and F2 processing Hastelloy samples showed negative direction change of the potential, and an active dissolution peak appeared in the F2 processing SUS316 samples. On the other hand, DLC samples on SUS316 and Hastelloy showed a small anode current. It appeared that DLC coating was a superior resistance layer for the corrosion.
収録刊行物
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- MATERIALS TRANSACTIONS
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MATERIALS TRANSACTIONS 49 (6), 1333-1337, 2008
公益社団法人 日本金属学会
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詳細情報
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- CRID
- 1390001204249421824
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- NII論文ID
- 10021147538
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- NII書誌ID
- AA1151294X
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- ISSN
- 13475320
- 13459678
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- NDL書誌ID
- 9519229
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可