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- 小駒 益弘
- 上智大学理工学部化学科
書誌事項
- タイトル別名
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- Surface Treatment using Atmospheric Pressure Plasma
- タイキアツ プラズマ ニ ヨル ヒョウメン ショリ
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抄録
Kogoma and coworkers previously reported that a homogenous glow plasma can be sustained using a barrier-type electrode system in an atmospheric pressure He gas. This approach succeeded in the surface treatment of industrial plastic films and deposition of solid substances that have usually treated in the low pressure glow plasma system. So, the use of atmospheric pressure glow plasma (APG) system should reduce the costs of plasma treatment for many kinds of the solid materials.<br> In the review, at first, the basic theory of the atmospheric-pressure glow plasma will be introduced to explain how to attain the homogenous glow plasma in high pressure condition. Then, the prospects will be presented for different styles of low temperature atmospheric pressure plasma systems. In the final part, some application studies such as organic film deposition, silica film deposition and surface treatment of liquid crystal polymer using APG plasma will be shown.<br>
収録刊行物
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- Journal of the Vacuum Society of Japan
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Journal of the Vacuum Society of Japan 51 (1), 2-7, 2008
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390001205294333568
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- NII論文ID
- 10021156529
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- NII書誌ID
- AA12298652
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- ISSN
- 18824749
- 18822398
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- NDL書誌ID
- 9382512
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可