大気圧プラズマによる表面処理 Surface Treatment using Atmospheric Pressure Plasma

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  Kogoma and coworkers previously reported that a homogenous glow plasma can be sustained using a barrier-type electrode system in an atmospheric pressure He gas. This approach succeeded in the surface treatment of industrial plastic films and deposition of solid substances that have usually treated in the low pressure glow plasma system. So, the use of atmospheric pressure glow plasma (APG) system should reduce the costs of plasma treatment for many kinds of the solid materials.<br>   In the review, at first, the basic theory of the atmospheric-pressure glow plasma will be introduced to explain how to attain the homogenous glow plasma in high pressure condition. Then, the prospects will be presented for different styles of low temperature atmospheric pressure plasma systems. In the final part, some application studies such as organic film deposition, silica film deposition and surface treatment of liquid crystal polymer using APG plasma will be shown.<br>

収録刊行物

  • 真空  

    真空 51(1), 2-7, 2008-01-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10021156529
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    REV
  • ISSN
    18822398
  • NDL 記事登録ID
    9382512
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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