大面積ガラスへのスパッタ・コーティング Large Area Sputter Coating on Glass

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  Large glass has been used for commercial buildings, housings and vehicles for many years. Glass size for flat displays is getting larger and larger. The glass for the 8<sup>th</sup> generation is more than 5 m<sup>2</sup> in area. Demand of the large glass is increasing not only in these markets but also in a solar cell market growing drastically. Therefore, large area coating is demanded to plus something else on glass more than ever.<br>   Sputtering and pyrolysis are the major coating methods on large glass today. Sputtering process is particularly popular because it can deposit a wide variety of materials in good coating uniformity on the glass.<br>   This paper describes typical industrial sputtering system and recent progress in sputtering technology. It also shows typical coated glass products in architectural, automotive and display fields and comments on their functions, film stacks and so on.<br>

収録刊行物

  • 真空  

    真空 51(1), 8-14, 2008-01-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10021156542
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    REV
  • ISSN
    18822398
  • NDL 記事登録ID
    9382517
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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