フィルタードアーク蒸着によるスーパーダイヤモンドライクカーボン膜合成 Preparation of Super-DLC Film by Filtered Cathodic Arc Deposition

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著者

    • 滝川 浩史 TAKIKAWA Hirofumi
    • 豊橋技術科学大学 電気・電子工学系 Department of Electrical and Electronic Engineering, Toyohashi University of Technology

抄録

  Diamond-like carbon (DLC) is usually classified into 4 kinds: tetrahedral amorphous carbon (sp<sup>3</sup> rich), ta-C; amorphous carbon (sp<sup>2</sup> rich), a-C; hydrogenated ta-C, ta-C:H; hydrogenated a-C, a-C:H. In this review paper, first, general properties of DLC, conventional preparation methods, and tutorial explanations of cathodic arc deposition and filtered arc deposition (FAD), are presented. New FAD systems designed especially for preparing droplet-free ta-C (super DLC) film with T- and X-shape filter ducts, T-FAD and X-FAD, are introduced. Some properties of above 4 kinds of DLC films, which were prepared by T-FAD under different conditions, were measured. Ta-C was the hardest and densest among the DLC films. Ta-C had a lower coefficient of friction than a-C:H prepared by plasma enhanced chemical vapor deposition (PECVD). X-FAD system made it possible to prepare thick ta-C film by employing interlayer of metal and graded DLC (a-C to ta-C).<br>

収録刊行物

  • 真空  

    真空 51(1), 20-25, 2008-01-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10021156575
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    REV
  • ISSN
    18822398
  • NDL 記事登録ID
    9382531
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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