Plasma Enhanced CVD System for Diamond-Like Carbon (DLC) Deposition

• SAMCO Inc.

  SAMCO Inc.

Bibliographic Information

Other Title

• ダイアモンドライクカーボン（DLC）膜形成装置

Journal

• Journal of the Vacuum Society of Japan

  Journal of the Vacuum Society of Japan 51 (1), 35-36, 2008

  The Vacuum Society of Japan

Keywords

• Spectroscopy
• Surfaces and Interfaces
• Instrumentation
• General Materials Science

Details

• CRID: 1390282680270637568
• NII Article ID: 10021156615
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj2.51.35
• ISSN: 18824749
• ISSN: 18822398
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles