機能性遷移金属酸化物薄膜の極限ナノ加工 Nano Fabrication of Functional Transition Metal Oxide Thin Films

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  Transition metal oxide films show a rich variety of peculiar properties, such as ferroelectricity, ferromagnetism, high T<sub><i>c</i></sub> superconductivity, colossal magnetoresistance, and so on. The method to process the oxide films down to nano scale is still under development. In this paper we introduce several techniques to process oxide films on the basis of AFM lithography and nanoimprint lithography. Using AFM based lithography, nanostructures of several tens nanometers have been realized. By Mo lift-off technique with nanoimprint lithography, we have obtained a large area dot array whose dot size is ~120 nm. These methods will lead to various room temperature functional oxide devices operated by light, electric field, magnetic field, and so on.<br>

収録刊行物

  • 真空  

    真空 51(1), 37-43, 2008-01-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10021156618
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    18822398
  • NDL 記事登録ID
    9382958
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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