Titanium Dioxide (TiO2) Single Crystal Holder with a Cold Trap and a Heating Mechanism Mounted on a Conflat Flange with an Outer Diameter of 70 mm
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- KAKIUCHI Takuhiro
- The Graduate University for Advanced Studies
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- MASE Kazuhiko
- The Graduate University for Advanced Studies Institute of Materials Structure Science, KEK PRESTO, Japan Science and Technology Agency
Bibliographic Information
- Other Title
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- 外径70 mm のコンフラットフランジにマウントした加熱冷却機構付き二酸化チタン(TiO2)単結晶ホルダー
- ガイケイ 70mm ノ コンフラット フランジ ニ マウントシタ カネツ レイキャク キコウ ツキ ニサンカ チタン TiO2 タンケッショウ ホルダー
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Abstract
We introduce a titanium dioxide (TiO2) single crystal holder with a cold trap and a heating mechanism mounted on a conflat flange with an outer diameter of 70 mm. The basic design of the TiO2 holder is the same with the holder for the silicon (Si) single crystal wafer [E. Kobayashi, A. Nambu, T. Kakiuchi, and K. Mase: Shinku, 50 (2007) 57]. A TiO2 single crystal wafer is fixed on a Si wafer, and the TiO2 is heated by the direct-current heating of the Si wafer. Using this holder we prepared clean TiO2(110)-1×1.<br>
Journal
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- Journal of the Vacuum Society of Japan
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Journal of the Vacuum Society of Japan 51 (1), 44-47, 2008
The Vacuum Society of Japan
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Details 詳細情報について
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- CRID
- 1390001205293928960
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- NII Article ID
- 10021156646
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- NII Book ID
- AA12298652
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- ISSN
- 18824749
- 18822398
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- NDL BIB ID
- 9382976
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed