二段式流量分配法による分圧真空計の校正サービス Calibration Service for Partial Pressure Analyzers by Two-stage Flow-dividing Method

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  The calibration service for partial pressure analyzers (PPA) has been carried out from April in 2007 at NMIJ/AIST using a two-stage flow-dividing system. The pressure range is from 10<sup>-6</sup> to 10<sup>-4</sup> Pa and the test gases are N<sub>2</sub>, Ar, He and H<sub>2</sub>.<br>   Results of the calibration for two types of PPA were also shown. The sensitivities of both PPAs were almost constant in the pressure range from 10<sup>-6</sup> to 10<sup>-4</sup> Pa, while they changed significantly with pressure higher than 10<sup>-4</sup> Pa. The calibration uncertainties mainly caused by the instability of PPA indication were about 7% (confidence level 95%). The stability of sensitivities of both PPAs was in about 15% for 7 months.<br>

収録刊行物

  • 真空

    真空 51(3), 109-111, 2008-03-20

    The Vacuum Society of Japan

参考文献:  4件中 1-4件 を表示

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    被引用文献1件

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    被引用文献1件

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    被引用文献1件

被引用文献:  2件中 1-2件 を表示

各種コード

  • NII論文ID(NAID)
    10021156829
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    18822398
  • NDL 記事登録ID
    9471251
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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