理想的な円筒形からのずれによるオリフィスコンダクタンスの変化 Change in Conductance of Cylindrical Orifice by Beveling its Edge and Tapering its Tube

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著者

    • 城 真範 SHIRO Masanori
    • (独)産業技術総合研究所 計測標準研究部門 力学計測科 圧力真空標準研究室 National Institute of Advanced Industrial Science and Technology (AIST)
    • 秋道 斉 AKIMICHI Hitoshi
    • (独)産業技術総合研究所 計測標準研究部門 力学計測科 圧力真空標準研究室 National Institute of Advanced Industrial Science and Technology (AIST)
    • 平田 正紘 HIRATA Masahiro
    • (独)産業技術総合研究所 計測標準研究部門 力学計測科 圧力真空標準研究室 National Institute of Advanced Industrial Science and Technology (AIST)

抄録

  Conductance of a thin cylindrical orifice is calculated farily accurately by an approximate equation. However, a practical orifice may have rounded edges and tapered shape. Influence of these deformation on the conductance was studied by Monte Calro simulation for thickness of the orifice <i>L</i>=0-0.1<i>r</i>, where <i>r</i> was the radius of the orifice, beveled depth Δ<i>L</i>=0-0.002<i>r</i>, angle of beveled edge θ=0-90° and difference of radius between inlet and outlet sides Δ<i>r</i>=0-0.002<i>r</i>. Results are 1) the conductance increases for 0.08% by beveling edge by 0.002<i>r</i> at the beveling angle of 45°, and the increase was proportional to Δ<i>L</i>, 2) an increase caused by beveling both inlet and outlet sides was almost twice as large as that caused by beveling either side, 3) an increase caused by beveling either side at the beveling angle of 20° was more than a half of an increase at the angle of 90° (reducing orifice thickness Δ<i>L</i>), 4) an increase caused by tapering radius Δ<i>r</i> was almost a half of the increase by enlarging the radius Δ<i>r</i>. These results were explained by an approximate equation based on a simple model.<br>

収録刊行物

  • 真空  

    真空 51(3), 112-114, 2008-03-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10021156834
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    18822398
  • NDL 記事登録ID
    9471257
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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