理想的な円筒形からのずれによるオリフィスコンダクタンスの変化

• 城 真範

  (独)産業技術総合研究所　計測標準研究部門　力学計測科　圧力真空標準研究室

• 秋道 斉

  (独)産業技術総合研究所　計測標準研究部門　力学計測科　圧力真空標準研究室

• 平田 正紘

  (独)産業技術総合研究所　計測標準研究部門　力学計測科　圧力真空標準研究室

書誌事項

タイトル別名

• Change in Conductance of Cylindrical Orifice by Beveling its Edge and Tapering its Tube
• リソウテキナ エントウケイ カラノ ズレ ニ ヨル オリフィス コンダクタンス ノ ヘンカ

抄録

  Conductance of a thin cylindrical orifice is calculated farily accurately by an approximate equation. However, a practical orifice may have rounded edges and tapered shape. Influence of these deformation on the conductance was studied by Monte Calro simulation for thickness of the orifice L=0-0.1r, where r was the radius of the orifice, beveled depth ΔL=0-0.002r, angle of beveled edge θ=0-90° and difference of radius between inlet and outlet sides Δr=0-0.002r. Results are 1) the conductance increases for 0.08% by beveling edge by 0.002r at the beveling angle of 45°, and the increase was proportional to ΔL, 2) an increase caused by beveling both inlet and outlet sides was almost twice as large as that caused by beveling either side, 3) an increase caused by beveling either side at the beveling angle of 20° was more than a half of an increase at the angle of 90° (reducing orifice thickness ΔL), 4) an increase caused by tapering radius Δr was almost a half of the increase by enlarging the radius Δr. These results were explained by an approximate equation based on a simple model.<br>

収録刊行物

• Ｊｏｕｒｎａｌ　ｏｆ　ｔｈｅ　Ｖａｃｕｕｍ　Ｓｏｃｉｅｔｙ　ｏｆ　Ｊａｐａｎ

  Ｊｏｕｒｎａｌ　ｏｆ　ｔｈｅ　Ｖａｃｕｕｍ　Ｓｏｃｉｅｔｙ　ｏｆ　Ｊａｐａｎ 51 (3), 112-114, 2008

  一般社団法人 日本真空学会

キーワード

• Spectroscopy
• Surfaces and Interfaces
• Instrumentation
• General Materials Science

詳細情報

• CRID: 1390001205295462400
• NII論文ID: 10021156834
• NII書誌ID: AA12298652
• DOI: 10.3131/jvsj2.51.112
• ISSN: 18824749
• ISSN: 18822398
• NDL書誌ID: 9471257
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9471257
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可