Mn-Ir/Co-Fe積層膜の構造と磁気特性に及ぼすスパッタガス種の影響 Effect of Sputtering Gases on Crystallographic Structure and Magnetic Property of Mn-Ir/Co-Fe Bilayers

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  The crystallographic structure of Mn-Ir layers and the magnetic property of Mn-Ir/Co-Fe bilayers were investigated for Ar pressure, <i>P</i><sub>Ar</sub>, and Kr pressure, <i>P</i><sub>Kr</sub>, for the deposition of the Mn-Ir layer. When Ar was used as the sputtering gas, the blocking temperature, <i>T</i><sub>B</sub>, was steeply decreased with decreasing <i>P</i><sub>Ar</sub>, and became <i>T</i><sub>B</sub>=220°C at <i>P</i><sub>Ar</sub>=0.04 Pa. However, in the case of Kr gas, <i>T</i><sub>B</sub> was 320°C at <i>P</i><sub>Kr</sub>=0.04 Pa. The surface roughness, R<sub>a</sub>, of bilayers at <i>P</i><sub>Ar</sub>=0.04 Pa was lowered, comparing to that at <i>P</i><sub>Kr</sub>=0.04 Pa. The X-ray diffraction profiles showed that the superlattice diffractions from the ordered Mn<sub>3</sub>Ir phase were detected around the pressures <i>P</i><sub>Ar</sub>=0.2 Pa-2.0 Pa and <i>P</i><sub>Kr</sub>=0.04 Pa-2.0 Pa. In <i>P</i><sub>Ar</sub>≤0.1 Pa, the damage cased by the recoiled Ar ions was suggested as an origin of the decreasing <i>T</i><sub>B</sub> and the disappearance of Mn<sub>3</sub>Ir phase.<br>

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  • 真空  

    真空 51(3), 145-148, 2008-03-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10021156923
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    18822398
  • NDL 記事登録ID
    9471397
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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