窒化ハフニウムフィールドエミッタアレイの耐久性の評価 Durability Evaluation of Hafnium Nitride Field Emitter Array

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著者

    • 宮田 雄高 MIYATA Yuko
    • 京都大学大学院工学研究科電子工学専攻 Department of Electronic Science and Engineering, Kyoto University
    • 神澤 太郎 KANZAWA Taro
    • 京都大学大学院工学研究科電子工学専攻 Department of Electronic Science and Engineering, Kyoto University
    • 辻 博司 TSUJI Hiroshi
    • 京都大学大学院工学研究科電子工学専攻 Department of Electronic Science and Engineering, Kyoto University
    • 石川 順三 ISHIKAWA Junzo
    • 京都大学大学院工学研究科電子工学専攻 Department of Electronic Science and Engineering, Kyoto University

抄録

  Hafniun nitiride field emitter array (HfN-FEA) was fabricated and the durability of HfN-FEA was evaluated. As the durability evaluation, we operated HfN-FEA in two different ways. One was long-time operation, and the other was the operation at elevated temperatures. HfN-FEAs worked stably for 100 hours and could be operated at 100°C. It was shown that HfN-FEA has a long life and capability of operation at high temperature. The insulating properties, however, became worse through these operations.<br>

収録刊行物

  • 真空

    真空 51(3), 162-164, 2008-03-20

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10021156961
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    18822398
  • NDL 記事登録ID
    9471476
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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