可塑性樹脂基板上に成膜したZnO膜の物性評価 Characteristics of ZnO Thin Films on Plastic Resin Substrates

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著者

    • 吉田 尚正 YOSHIDA Takamasa
    • 東京電機大学工学部先端先端科学技術研究科 Department of Materials Science and Engineering, Tokyo Denki University
    • 田巻 明 TAMAKI Akira
    • 東京電機大学工学部先端先端科学技術研究科 Department of Materials Science and Engineering, Tokyo Denki University

抄録

  ZnO thin films on plastic resin substrates were prepared by RF magnetron sputtering. Substrate used polycarbonate of plastic resin. ZnO thin films changed sputtering time and RF power and produced it. Surface morphology were studied by scanning electron microscopy (SEM) and atomic force mi-croscopy (AFM). Adhesive power of thin films on substrates were studied by peel test. Transparency and surface unevenness of ZnO thin films on plastic resin substrates were able to be improved by lowering RF power. ZnO thin films on plastic resin substrates found that adhesive power was stronger than ITO thin films on plastic resin substrates.<br>

収録刊行物

  • 真空

    真空 51(3), 175-177, 2008-03-20

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10021156994
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    18822398
  • NDL 記事登録ID
    9471505
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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