フッ素樹脂をターゲットとして高周波スパッタリングにより作製した有機フッ素薄膜の特性 Characterization of Polymer Thin Films Prepared with RF Sputtering with Fluorocarbon Polymer Targets

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  Polymer thin films were prepared by RF sputtering with argon (Ar) and tetra-fluorocarbon (CF<sub>4</sub>) gases. Four fluorocarbon polymers, poly(tetra fluoro ethylene) (PTFE), tetra fluoro ethylene-perfluoro alkylvinyl ether copolymer (PFA), fluorinated ethylene propylene copolymer (FEP), poly(vinylidene di fluoride) (PVDF) were used as the sputtering targets. Molecular structures of sputtered fluorocarbon thin films were analyzed with x-rays photoelectron spectroscopy (XPS) and fourier transform infrared spectroscopy (FT-IR). Wettability of these polymer thin films was estimated with contact angles of water droplets. The contact angles increased with increase of the F/C ratio (fluorine for carbon) of the thin film. PTFE target prepared by a spin coat method was also used for the sputtering target, and analyzed the elemental compositions of the target after the sputtering. The F/C ratio of the polymer thin film prepared by the sputtering with CF<sub>4</sub> was almost the same value as that of the thin film with Ar. However, the C/F ratio of the target after the CF<sub>4</sub> sputtering was much higher than that after the Ar sputtering.<br>

収録刊行物

  • 真空  

    真空 51(3), 201-204, 2008-03-20 

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10021157055
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    18822398
  • NDL 記事登録ID
    9471575
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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