軸対称透過形電離真空計の感度係数のばらつきと安定性 Characteristics of the Axial-symmetric Transmission Gauge : Deviation and Long Term Stability of Sensitivity Factor

この論文にアクセスする

この論文をさがす

著者

抄録

  The deviation of the sensitivity factors for the axial-symmetric transmission gauge (AT gauge) were examined and compared with those for the B-A gauges and the extractor gauges. The calibrations were performed against nitrogen. The deviations for three types of gauges were about ±10%, nearly the same one another. The long-term variation of the sensitivity factor for two AT gauges was also examined. For one sensor, the sensitivity factor decreased 10% during initial two years operation while the factor stabilized within ±3% for the successive three years. The temperature dependence of the sensitivity factor is discussed for the data obtained in the stabilized period.<br>

収録刊行物

  • 真空  

    真空 51(6), 377-381, 2008-06-20 

    The Vacuum Society of Japan

参考文献:  10件

参考文献を見るにはログインが必要です。ユーザIDをお持ちでない方は新規登録してください。

各種コード

  • NII論文ID(NAID)
    10021157695
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    18822398
  • NDL 記事登録ID
    9571163
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
ページトップへ