軸対称透過形電離真空計の感度係数のばらつきと安定性 Characteristics of the Axial-symmetric Transmission Gauge : Deviation and Long Term Stability of Sensitivity Factor

この論文にアクセスする

この論文をさがす

著者

抄録

  The deviation of the sensitivity factors for the axial-symmetric transmission gauge (AT gauge) were examined and compared with those for the B-A gauges and the extractor gauges. The calibrations were performed against nitrogen. The deviations for three types of gauges were about ±10%, nearly the same one another. The long-term variation of the sensitivity factor for two AT gauges was also examined. For one sensor, the sensitivity factor decreased 10% during initial two years operation while the factor stabilized within ±3% for the successive three years. The temperature dependence of the sensitivity factor is discussed for the data obtained in the stabilized period.<br>

収録刊行物

  • 真空

    真空 51(6), 377-381, 2008-06-20

    The Vacuum Society of Japan

参考文献:  10件中 1-10件 を表示

  • <no title>

    LECK J. H.

    Total and partial pressure measurement in vacuum systems, 1989

    被引用文献1件

  • <no title>

    HIRATA H.

    J. Vac. Sci. Technol. 20, 1159, 1982

    被引用文献1件

  • <no title>

    AKIMICHI H.

    Shinku 43, 177, 2000

    被引用文献1件

  • <no title>

    TAKAHASHI N.

    Shinku 46, 619, 2002

    被引用文献1件

  • <no title>

    KUMAGAYA H.

    Shinku no butsuri to ouyou, 1970

    被引用文献1件

  • <no title>

    PEACOCK R. N.

    Foundations of vacuum science and technology, 1998

    被引用文献1件

  • <no title>

    POULTER K. F.

    Vacuum 31, 147, 1981

    被引用文献1件

  • <no title>

    MCCULLOH K. E.

    J. Vac. Sci. Technol. A 3, 1738, 1985

    被引用文献1件

  • <no title>

    HIRATA M.

    J. Vac. Sci. Technol. A 4, 1724, 1986

    被引用文献1件

  • <no title>

    JOUSTEN K.

    J. Vac. Sci. Technol. A 13, 2266, 1995

    被引用文献1件

各種コード

  • NII論文ID(NAID)
    10021157695
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    18822398
  • NDL 記事登録ID
    9571163
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
ページトップへ