Energy Distribution Measurements of Silicon Field Emitter Arrays with a Hemispherical Energy Analyzer
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- SAKAI Yoshiki
- Department of Electronic Science and Engineering, Kyoto University
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- OOWADA Atsushi
- Department of Electronic Science and Engineering, Kyoto University
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- TAKEUCHI Mitsuaki
- Japan Science and Technology Agency (JST), Innovation Plaza Kyoto
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- GOTOH Yasuhito
- Department of Electronic Science and Engineering, Kyoto University
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- NAGAO Masayoshi
- National Institute of Advanced Industrial Science and Technology (AIST)
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- TSUJI Hiroshi
- Department of Electronic Science and Engineering, Kyoto University
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- ISHIKAWA Junzo
- Department of Electronic Science and Engineering, Kyoto University
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- SAKAI Shigeki
- Nissin Ion Equipment Co., Ltd
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- KIMOTO Tsunenobu
- Department of Electronic Science and Engineering, Kyoto University
Bibliographic Information
- Other Title
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- 半球形阻止電界型エネルギー分析器を用いたシリコン電界放出電子源のエネルギー分析
- ハンキュウケイ ソシ デンカイガタ エネルギー ブンセキキ オ モチイタ シリコン デンカイ ホウシュツ デンシゲン ノ エネルギー ブンセキ
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Abstract
Energy distribution of n-type silicon field emitter array (Si-FEA) was measured with a hemispherical collector. Adjusting the position, the energy spread and the peak shift of the FEA were lower than those without alignment. The peak shift and wide energy spread became larger with an increase in the extraction voltage or emission current. Some possible reasons of the peak shift and energy spread were discussed.<br>
Journal
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- Journal of the Vacuum Society of Japan
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Journal of the Vacuum Society of Japan 51 (6), 401-404, 2008
The Vacuum Society of Japan
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Details 詳細情報について
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- CRID
- 1390001205295919360
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- NII Article ID
- 10021157747
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- NII Book ID
- AA12298652
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- ISSN
- 18824749
- 18822398
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- NDL BIB ID
- 9571229
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed
