半球形阻止電界型エネルギー分析器を用いたシリコン電界放出電子源のエネルギー分析 Energy Distribution Measurements of Silicon Field Emitter Arrays with a Hemispherical Energy Analyzer

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抄録

  Energy distribution of n-type silicon field emitter array (Si-FEA) was measured with a hemispherical collector. Adjusting the position, the energy spread and the peak shift of the FEA were lower than those without alignment. The peak shift and wide energy spread became larger with an increase in the extraction voltage or emission current. Some possible reasons of the peak shift and energy spread were discussed.<br>

収録刊行物

  • 真空

    真空 51(6), 401-404, 2008-06-20

    The Vacuum Society of Japan

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各種コード

  • NII論文ID(NAID)
    10021157747
  • NII書誌ID(NCID)
    AN00119871
  • 本文言語コード
    JPN
  • 資料種別
    SHO
  • ISSN
    18822398
  • NDL 記事登録ID
    9571229
  • NDL 雑誌分類
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL 請求記号
    Z16-474
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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