局所クリーン化リサーチシステムと半導体表面・界面への応用 Encapsulated Production System and its Application to Semiconductor Surface and Interface

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We developed an Encapsulated Production System (EPS) composed of the human space and the product space. The product space is isolated from the human space in protection from penetration of particle and gas in the human space. Concentrations of oxygen, particle, and dissolved oxygen in solutions in the product space are of 5 orders of magnitude lower than those in atmosphere. As an experimental application of the system to the control of semiconductor surface and interface, we formed Schottky barrier diodes of Al/Si(111) interface in the EPS system and investigated diode leakage currents. It was found that electrically-ideal interfaces with no leakage current and no fluctuation of Schottky barrier heights were formed in the system.

収録刊行物

  • 表面科学 = Journal of The Surface Science Society of Japan  

    表面科学 = Journal of The Surface Science Society of Japan 29(6), 375-381, 2008-06-10 

    The Surface Science Society of Japan

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各種コード

  • NII論文ID(NAID)
    10021166439
  • NII書誌ID(NCID)
    AN00334149
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    03885321
  • NDL 記事登録ID
    9545828
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z15-379
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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