プロトン導電性酸化物エピタキシャル薄膜の作製とその構造および導電特性評価 [in Japanese] Fabrication of Proton Conducting Oxide Epitaxial Thin Films and Evaluation of Their Characteristics and Electrical Properties [in Japanese]
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Epitaxial thin films of 5 mol% Y-doped BaZrO<SUB>3</SUB> (BZY5) proton conducting oxide were fabricated on MgO and Nb-doped SrTiO<SUB>3</SUB> single crystal substrates using PLD method. Crystal structure, microstructure and electrical properties in in-plane and perpendicular directions of those films were studied. BZY5 is grown epitaxially over 700<SUP>o</SUP>C, and its epitaxial relationship is typical "Cube on Cube type". TEM and AFM observations reveal that the films consist of columnar structure. Electrical properties in in-plain direction show significant lower conductivity and higher activation energy than that in perpendicular direction, and the properties are close to that of grain boundary in ceramics, while the electrical properties in perpendicular direction are similar to that of bulk in ceramics. These results suggest that the interfaces between columnar crystals even in epitaxial thin films prevent proton migration as the grain boundaries in ceramics do.
- J. Surf. Sci. Soc. Jpn.
J. Surf. Sci. Soc. Jpn. 29(7), 396-400, 2008-07-10
The Surface Science Society of Japan