メタンプラズマを用いてイオン注入した高速度工具鋼の表面特性 Surface Properties on High-Speed Tool Steel Implanted with Methane Plasma

この論文にアクセスする

この論文をさがす

著者

抄録

Carbon ions were implanted into hardened high-speed tool steel by means of a plasma immersion ion implantation (PIII) technique with methane gas. Various process times were used in order to investigate the relationship between mechanical properties and depth distribution of carbon, and to examine whether it is possible to apply PIII for practical use for commercialized high-speed tool steel substrate. The implanted surface was characterized by X-ray diffractmeter (XRD) for investigation of surface structure. Auger electron spectroscopy (AES) was used to determine the depth distribution profile of the elements in substrate. Raman spectroscopy was also utilized for the characterization of carbon film deposited on the substrate. Substrate temperature was estimated from the hardness of a tool steel substrate treated simultaneously. Substrate temperature did not exceed the tempering temperature of high-speed tool steel, and was below 532K. Short term implantation with −20kV of negative bias caused a high concentration of carbon at the steel surface. On the other hand, carbon film was deposited on the carbon enriched surface by long term implantation. Raman spectrum for the deposited carbon film showed that for a typical DLC film. Friction test with a bearing steel ball as a counter material was similar to that the friction coefficient of deposited DLC film, carbon implanted layer, and steel substrate were 0.2, 0.3 and over 0.5, respectively. These results suggest that PIII with methane is feasible for the surface treatment of high-speed tool steel as both the implanted carbon and the DLC film reduce its friction coefficient in dry conditions.

収録刊行物

  • 表面技術 = The Journal of the Surface Finishing Society of Japan  

    表面技術 = The Journal of the Surface Finishing Society of Japan 59(3), 185-189, 2008-03-01 

    The Surface Finishing Society of Japan

参考文献:  13件

参考文献を見るにはログインが必要です。ユーザIDをお持ちでない方は新規登録してください。

被引用文献:  1件

被引用文献を見るにはログインが必要です。ユーザIDをお持ちでない方は新規登録してください。

各種コード

  • NII論文ID(NAID)
    10021169597
  • NII書誌ID(NCID)
    AN1005202X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    09151869
  • NDL 記事登録ID
    9407586
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z17-291
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
ページトップへ