メタンプラズマを用いてイオン注入した高速度工具鋼の表面特性 三尾 淳 川口 雅弘 青木 才子 森河 和雄 鈴木 秀人 一般社団法人 表面技術協会 表面技術 = The Journal of the Surface Finishing Society of Japan 09151869 59 3 185 189 2008-03-01 Carbon ions were implanted into hardened high-speed tool steel by means of a plasma immersion ion implantation (PIII) technique with methane gas. Various process times were used in order to investigate the relationship between mechanical properties and depth distribution of carbon, and to examine whether it is possible to apply PIII for practical use for commercialized high-speed tool steel substrate. The implanted surface was characterized by X-ray diffractmeter (XRD) for investigation of surface structure. Auger electron spectroscopy (AES) was used to determine the depth distribution profile of the elements in substrate. Raman spectroscopy was also utilized for the characterization of carbon film deposited on the substrate. Substrate temperature was estimated from the hardness of a tool steel substrate treated simultaneously. Substrate temperature did not exceed the tempering temperature of high-speed tool steel, and was below 532K. Short term implantation with −20kV of negative bias caused a high concentration of carbon at the steel surface. On the other hand, carbon film was deposited on the carbon enriched surface by long term implantation. Raman spectrum for the deposited carbon film showed that for a typical DLC film. Friction test with a bearing steel ball as a counter material was similar to that the friction coefficient of deposited DLC film, carbon implanted layer, and steel substrate were 0.2, 0.3 and over 0.5, respectively. These results suggest that PIII with methane is feasible for the surface treatment of high-speed tool steel as both the implanted carbon and the DLC film reduce its friction coefficient in dry conditions. 2008-03-01 10021169597 AN1005202X 9407586 JPN CJP CJPref NDL J-STAGE 0 13 1 Surface Properties on High-Speed Tool Steel Implanted with Methane Plasma MITSUO Atsushi KAWAGUCHI Masahiro AOKI Saiko MORIKAWA Kazuo SUZUKI Hideto The Surface Finishing Society of Japan Journal of The Surface Finishing Society of Japan Carbon ions were implanted into hardened high-speed tool steel by means of a plasma immersion ion implantation (PIII) technique with methane gas. Various process times were used in order to investigate the relationship between mechanical properties and depth distribution of carbon, and to examine whether it is possible to apply PIII for practical use for commercialized high-speed tool steel substrate. The implanted surface was characterized by X-ray diffractmeter (XRD) for investigation of surface structure. Auger electron spectroscopy (AES) was used to determine the depth distribution profile of the elements in substrate. Raman spectroscopy was also utilized for the characterization of carbon film deposited on the substrate. Substrate temperature was estimated from the hardness of a tool steel substrate treated simultaneously. Substrate temperature did not exceed the tempering temperature of high-speed tool steel, and was below 532K. Short term implantation with −20kV of negative bias caused a high concentration of carbon at the steel surface. On the other hand, carbon film was deposited on the carbon enriched surface by long term implantation. Raman spectrum for the deposited carbon film showed that for a typical DLC film. Friction test with a bearing steel ball as a counter material was similar to that the friction coefficient of deposited DLC film, carbon implanted layer, and steel substrate were 0.2, 0.3 and over 0.5, respectively. These results suggest that PIII with methane is feasible for the surface treatment of high-speed tool steel as both the implanted carbon and the DLC film reduce its friction coefficient in dry conditions. 三尾 淳 MITSUO Atsushi 茨城大学 大学院理工学研究科 Graduate School of Science and Engineering, Ibaraki University 川口 雅弘 KAWAGUCHI Masahiro 東京都立産業技術研究センター Tokyo Metropolitan Industrial Technology Research Institute 青木 才子 AOKI Saiko 東京都立産業技術研究センター Tokyo Metropolitan Industrial Technology Research Institute 森河 和雄 MORIKAWA Kazuo 東京都立産業技術研究センター Tokyo Metropolitan Industrial Technology Research Institute 鈴木 秀人 SUZUKI Hideto 茨城大学 工学部 Faculty of Engineering, Ibaraki University