Analysis of Hydrogen Concentration in DLC Films by Raman Spectroscopy

• MIURA Ken-ichi

  Technology Research Institute of Osaka Prefecture

• NAKAMURA Morimasa

  Kyoto Institute of Technology

Bibliographic Information

Other Title

• ラマン分光法によるＤＬＣ膜中水素濃度の分析
• ラマン ブンコウホウ ニ ヨル DLCマクチュウ スイソ ノウド ノ ブンセキ

Journal

• Journal of The Surface Finishing Society of Japan

  Journal of The Surface Finishing Society of Japan 59 (3), 203-205, 2008

  The Surface Finishing Society of Japan

Keywords

• Diamond-like Carbon
• Hydrogen Concentration
• Qualitative Analysis
• Raman Spectroscopy
• Glow Discharge Spectroscopy

Details

• CRID: 1390282679093351424
• NII Article ID: 10021169655
• NII Article ID: 20001490496
• NII Book ID: AN1005202X
• DOI: 10.4139/sfj.59.203
• COI: 1:CAS:528:DC%2BD1cXktFGmt7g%3D
• ISSN: 18843409
• ISSN: 09151869
• NDL BIB ID: 9407739
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9407739
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles