Fe/Pt極薄2層構造膜からの垂直磁気記録媒体用FePt規則合金(001)配向膜の作製 Fabrication of Ultra Thin fct-FePt(001) Ordered Alloy Thin Films from Pt/Fe Bilayers for Perpendicular Magnetic Recording Media
Pt(3nm)/Fe(3nm) bilayered films deposited directly on glass disk substrates at room temperature exhibited preferential (100) orientation in Pt as well as Fe layers because of a hetero epitaxial growth from the bottom Fe(100) to the top Pt(100) textures. Highly ordered fct-FePt(001) alloy texture was appeared in the bi-layered film after annealed at 600°C in hydrogen atmosphere. Increase of substrate temperature up to 600°C during the deposition of 3nm-thick Pt layer on the Fe layer brought about a direct fabrication of fct-FePt(001) ordered alloy thin film.
粉体および粉末冶金 55(2), 121-126, 2008-02-15
Japan Society of Powder and Powder Metallurgy