GHz帯に共鳴周波数を有するFeCoB/NiFe/Si薄膜の透磁率特性 High Frequency Characteristics of FeCoB/NiFe/Si Thin Films with Resonance Frequency in the GHz Range

この論文にアクセスする

この論文をさがす

著者

抄録

Recently the development of the magnetic devices has been expected in the high frequency applications. The soft magnetic films with large saturation magnetization and high anisotropy field <I>H<SUB>k</SUB></I> have been required. In this study, FeCoB/NiFe/Si thin films deposited by Facing Targets Sputtering (FTS) system have saturation magnetization of 2 T and <I>H<SUB>k</SUB></I> of 20 kA/m, and exhibited high ferromagnetic resonance (FMR) frequency of 6.0-7.0 GHz in permeability characteristics. For improvement of high frequency permeability characteristics, we reduced the thickness of FeCoB soft magnetic layer. The results showed that damping constant was reduced and exhibited smaller loss capability. When changing of the FeCoB thickness, we investigated the change of anisotropy field <I>H<SUB>k</SUB></I> and FeCoB(110) lattice spacing in the perpendicular direction, which indicated that there was correlation between each other. From this relationship, we examined the origin of anisotropy field <I>H<SUB>k</SUB></I>.

収録刊行物

  • 粉体および粉末冶金  

    粉体および粉末冶金 55(2), 127-131, 2008-02-15 

    Japan Society of Powder and Powder Metallurgy

参考文献:  8件

参考文献を見るにはログインが必要です。ユーザIDをお持ちでない方は新規登録してください。

各種コード

  • NII論文ID(NAID)
    10021172734
  • NII書誌ID(NCID)
    AN00222724
  • 本文言語コード
    JPN
  • 資料種別
    REV
  • ISSN
    05328799
  • NDL 記事登録ID
    9390146
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z17-274
  • データ提供元
    CJP書誌  NDL  J-STAGE 
ページトップへ