MOCVD法によるCa-Ti-OおよびCa-P-O系傾斜機能バイオセラミックス膜の合成 Preparation of Ca-Ti-O/Ca-P-O Functionally Graded Bio-ceramic Film by MOCVD

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Ca-Ti-O and Ca-P-O films were prepared by MOCVD. The phases, composition and morphology of Ca-Ti-O and Ca-P-O films changed depending on the molar ratio of Ca to Ti (<I>R</I><SUB>Ca/Ti</SUB>) and Ca to P (<I>R</I><SUB>Ca/P</SUB>) precursors, total pressure (<I>P</I><SUB>tot</SUB>) and substrate temperature (<I>T</I><SUB>sub</SUB>). CaTiO<SUB>3</SUB> films in a single phase were obtained at <I>T</I><SUB>sub</SUB>=973 and 1073 K. CaTiO<SUB>3</SUB> films prepared at <I>T</I><SUB>sub</SUB>=873 K had a dense and smooth surface. CaTiO<SUB>3</SUB> films prepared at <I>T</I><SUB>sub</SUB>=1073 K had complicated rough surface with a cauliflower-like texture. α-TCP and HAp films in a single phase were obtained at <I>T</I><SUB>sub</SUB>=973 and 1073 K, and both films had dense microstructure. Apatite formed after 3 days on the CaTiO<SUB>3</SUB> film, while 14 days on the α-TCP film and 6 hours on the HAp film, respectively. Functionally graded Ca-Ti-O/Ca-P-O films were successfully prepared by MOCVD, and expected to have good bone conductivity and adherence to Ti substrate.

収録刊行物

  • 粉体および粉末冶金

    粉体および粉末冶金 55(5), 325-330, 2008-05-15

    Japan Society of Powder and Powder Metallurgy

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各種コード

  • NII論文ID(NAID)
    10021173154
  • NII書誌ID(NCID)
    AN00222724
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    05328799
  • NDL 記事登録ID
    9531518
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z17-274
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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