プラズマCVD法による歯科金属材料へのTiO_2コーティング Preparation of TiO_2 Coating on Dental Metal Materials by Plasma CVD

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著者

    • 丸森 亮太朗 MARUMORI Ryotaro
    • 東北大学大学院歯学研究科 腔修復学講座咬合機能再建学分野 Division of fixed Prosthodontics, Department of Restorative Dentistry, Tohoku University Graduate School of Dentistry
    • 木村 禎一 KIMURA Teiichi
    • 東北大学金属材料研究所複合機能材料学部門 Multi-functional Materials Science Institute for Materials Research Tohoku University
    • 後藤 孝 [他] GOTO Takashi
    • 東北大学金属材料研究所複合機能材料学部門 Multi-functional Materials Science Institute for Materials Research Tohoku University
    • 依田 正信 YODA Masanobu
    • 東北大学大学院歯学研究科 腔修復学講座咬合機能再建学分野 Division of fixed Prosthodontics, Department of Restorative Dentistry, Tohoku University Graduate School of Dentistry
    • 木村 幸平 KIMURA Kohei
    • 東北大学大学院歯学研究科 腔修復学講座咬合機能再建学分野 Division of fixed Prosthodontics, Department of Restorative Dentistry, Tohoku University Graduate School of Dentistry

抄録

In this study, TiO<SUB>2</SUB> films were prepared on Ag-Pd alloys by Plasma-enhanced Chemical Vapor Deposition (PECVD) using Ti(O-<I>i</I>-Pr)<SUB>2</SUB>(dpm)<SUB>2</SUB> precursor. Ag-Pd alloys are widely used as a substrate material of a resin-veneered dental crown. Since an adhesion of a dental resin to the Ag-Pd alloy substrate is poor, protuberances are usually formed on the substrate surface to sustain the mechanical retention. One of the weak points in the resin-veneered dental crown is that a mechanical retention should be indispensable to fix the resin onto the metal frame. Instead of mechanical retention, TiO<SUB>2</SUB> films were prepared on the substrates.<BR>The effects of the deposition conditions on the crystalline phases, microstructures, and color of the deposited films were investigated. As a result, at a substrate pre-heating temperature T<SUB>dep</SUB>=500°C, microwave power P<SUB>M</SUB>=2 kW, deposition pressure P<SUB>tot</SUB>=0.4 or 0.7 kPa, the film color changed from black to white, and crystalline phase was anatase. And the microstructure of the film was granular. The grain size was a diameter of about 100 nm. These are optimum deposition conditions.

収録刊行物

  • 粉体および粉末冶金  

    粉体および粉末冶金 55(5), 331-335, 2008-05-15 

    Japan Society of Powder and Powder Metallurgy

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各種コード

  • NII論文ID(NAID)
    10021173170
  • NII書誌ID(NCID)
    AN00222724
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    05328799
  • NDL 記事登録ID
    9531547
  • NDL 雑誌分類
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL 請求記号
    Z17-274
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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