エアロゾルデポジションによる高周波キャパシタ膜の形成とその応用 Microwave Capacitor Film Using Aerosol Deposition and Its Application

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著者

    • 明渡 純 AKEDO Jun
    • 独立行政法人産業技術総合研究所 先進製造プロセス研究部門 National Institute of Advanced Industrial Science and Technology

抄録

Miniaturization, cost reduction and higher performance in RF wireless communication products are demanded for constructing a ubiquitous computing network system. To fulfill these demands, we propose an organic built-up circuit board with various embedded passive ceramic component films for the next-generation RF modules.<BR> In the circuit board we propose, ceramic films have to be built-up on a resin substrate at a temperature lower than the endurance temperature of the resin. Our novel aerosol deposition (ASD) method through the use of accelerated ceramic nano-particle bombardment is therefore one of the most effective deposition methods for the ceramic film.<BR> We describe a novel ASD approach to fabricate embedded capacitors on organic flame retardant type 4 (FR-4) substrates and the correlation between the microstructure and dielectric properties of ASD dielectric films deposited under various conditions. We also confirmed the formation of dense BaTiO<SUB>3</SUB> dielectric films on organic substrates at room temperature. Embedded capacitors on an FR-4 substrate, fabricated as a prototype with this ASD film, had a capacitance density of 300 nF/cm<SUP>2</SUP>.

収録刊行物

  • エアロゾル研究 = Journal of aerosol research  

    エアロゾル研究 = Journal of aerosol research 22(1), 14-19, 2007-03-20 

    日本エアロゾル学会

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各種コード

  • NII論文ID(NAID)
    10021918003
  • NII書誌ID(NCID)
    AN10041511
  • 本文言語コード
    JPN
  • 資料種別
    REV
  • ISSN
    09122834
  • NDL 記事登録ID
    8750207
  • NDL 雑誌分類
    ZP5(科学技術--化学・化学工業--化学工学)
  • NDL 請求記号
    Z17-1062
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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