Development of micropattern fabrication technique using maskless exposure device equipped with an LCD projector

• ITOGA Kazuyoshi

  Tokyo Women's Medical University

• KOBAYASHI Jun

  Tokyo Women's Medical University

• YAMATO Masayuki

  Tokyo Women's Medical University

• OKANO Teruo

  Tokyo Women's Medical University

Bibliographic Information

Other Title

• 液晶プロジェクタを用いたマスクレス露光装置によるマイクロパターン作製技術の開発

Journal

• 電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan

  電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan 2008 (16), 1-4, 2008-09-11

Keywords

• Photolithography
• LCD projector
• maskless
• micropattern
• cell micropatterning
• photopolymerization
• photoresist
• XY stage
• polyacrylamide

Details

• CRID: 1570291225651765504
• NII Article ID: 10021923567
• NII Book ID: AA12049250
• Text Lang: ja
• Data Source:
  • CiNii Articles