SECONDARY-ION YIELD FROM SOLID SURFACES BY ION BOMBARDMENT : EFFECT OF SURFACE-OXYGEN COVERAGE

• SHOUJI K.

  Department of Applied Physics, Faculty of Technology, Tokyo University of Agriculture and Technology

• MOTOHASHI K.

  Department of Applied Physics, Faculty of Technology, Tokyo University of Agriculture and Technology

• TSURUBUCHI S.

  Department of Applied Physics, Faculty of Technology, Tokyo University of Agriculture and Technology

• NIMURA T.

  Kawasaki Microelectronics, Inc

• WADA R.

  Kawasaki Microelectronics, Inc

Journal

• Atomic collision research in Japan

  Atomic collision research in Japan (29), 36-, 2003-12-15

Details

• CRID: 1574231875317201152
• NII Article ID: 10021992429
• NII Book ID: AA11068271
• Text Lang: en
• Data Source:
  • CiNii Articles