CONTROL OF O_2 ADSORPTION AND SiO DESORPTION BY INCIDENT ENERGY OF O_2 MOLECULES IN THE O_2/Si(001) SURFACE REACTION SYSTEM

• TERAOKA Y.

  Synchrotron Radiation Research Center, Japan Atomic Energy Research Institute

• YOSHIGOE A.

  Synchrotron Radiation Research Center, Japan Atomic Energy Research Institute

• MORITANI K.

  Synchrotron Radiation Research Center, Japan Atomic Energy Research Institute

Journal

• Atomic collision research in Japan

  Atomic collision research in Japan (29), 68-70, 2003-12-15

Details

• CRID: 1571698600527221632
• NII Article ID: 10021992507
• NII Book ID: AA11068271
• Text Lang: en
• Data Source:
  • CiNii Articles