Chemistry of photolithographic imaging materials based on the chemical amplification concept

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収録刊行物

  • Journal of photochemistry and photobiology. C, Photochemistry reviews

    Journal of photochemistry and photobiology. C, Photochemistry reviews 8(4), 157-173, 2007-12-01

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  • 1 / 2
  • <no title>

    KIM S. T.

    Polym. Sci. Technol. 16(1), 4-19, 2005

    被引用文献1件

  • <no title>

    GARGINI P.

    Solid State Technol 41, 73-76, 1998

    被引用文献1件

  • <no title>

    ITO H.

    Polym. Eng. Sci. 23, 1012-1018, 1983

    被引用文献1件

  • <no title>

    ITO H.

    Polymers in Electronics, 1984

    被引用文献1件

  • <no title>

    DAMMEL R.

    Diazonaphthoquinone-based resists Tutorial Texts Series in Optical Engineering TT11, 1-8, 1993

    被引用文献1件

  • <no title>

    HANABATA M.

    Adv. Resist Technol. Process. VII Proc. SPIE 1262, 476-482, 1990

    被引用文献1件

  • <no title>

    HANABATA M.

    Adv. Resist Technol. Process. V Proc. SPIE 920, 349-354, 1988

    被引用文献1件

  • <no title>

    ZAMPINI A.

    Adv. Resist Technol. Process. XIII Proc. SPIE 2724, 525-532, 1996

    被引用文献1件

  • <no title>

    DICARLO J.

    Adv. Resist Technol. Process. XI Proc. SPIE 2195, 696-706, 1994

    被引用文献1件

  • <no title>

    BUHR G.

    Adv. Resist Technol. Process. VI Proc. SPIE 1086, 117-128, 1989

    被引用文献1件

  • <no title>

    VOLLENBROCK F. A.

    Proc. ACS Div. Polym. Mater. Sci. Eng. 61, 283-290, 1989

    被引用文献1件

  • <no title>

    HANABATA M.

    Adv. Resist Technol. Process. IV Proc. SPIE 771, 85-92, 1987

    被引用文献1件

  • <no title>

    HANABATA M.

    Adv. Resist Technol. Process. V Proc. SPIE 920, 349-354, 1988

    被引用文献1件

  • <no title>

    BORZO M.

    Adv. Resist Technol. Process. XI Proc. SPIE 2195, 673-684, 1994

    被引用文献1件

  • <no title>

    KONDO S.

    U.S. Patent, US005340683A

    被引用文献1件

  • <no title>

    ICHIKAWA K.

    U.S. Patent, US005726217A

    被引用文献1件

  • <no title>

    UETANI Y.

    U.S. Patent, US005407779A

    被引用文献1件

  • <no title>

    CRIVELLO J. V.

    Polymers in Electronics, 1984

    被引用文献1件

  • <no title>

    DE MAYO P.

    Adv. Org. Chem. 2, 367-425, 1960

    被引用文献1件

  • <no title>

    HOULIHAN F. M.

    Adv. Resist Technol. Process. V Proc. SPIE 920, 67-74, 1988

    被引用文献1件

  • <no title>

    NEENAN T. X.

    Adv. Resist Technol. Process. VI Proc. SPIE 1086, 2-10, 1989

    被引用文献1件

  • <no title>

    YAMAOKA T.

    J. Chem. Soc. Perkin Trans. 210, 1709-1714, 1990

    被引用文献1件

  • <no title>

    DAMMEL R.

    Diazonaphthoquinone-based resists Tutorial Texts Series in Optical Engineering TT11, 9-28, 1993

    被引用文献1件

  • <no title>

    BUHR G.

    Proc. ACS Div. Polym. Mater. Sci. Eng. 61, 269-277, 1989

    被引用文献1件

  • <no title>

    PAWLOWSKI G.

    Adv. Resist Technol. Process. VII Proc. SPIE 1262, 16-25, 1990

    被引用文献1件

  • <no title>

    URANO F.

    U.S. Patent, US005558971A

    被引用文献1件

  • <no title>

    ITO H.

    U.S. Patent, US004491628A

    被引用文献1件

  • <no title>

    SCHWALM R.

    J. Chem. Soc. Perkin Trans. 211, 1803-1808, 1991

    被引用文献1件

  • <no title>

    SCHWALM R.

    Polym. Mater. Sci. Eng. 61, 278-282, 1989

    被引用文献1件

  • <no title>

    PAWLOWSKI G.

    Adv. Resist Technol. Process. VII Proc. SPIE 1262, 391-400, 1990

    被引用文献1件

  • <no title>

    CONLEY W.

    Adv. Resist Technol. Process. VIIII Proc. SPIE 2724, 34-60, 1996

    被引用文献1件

  • <no title>

    O'BRIEN M. J.

    Adv. Resist Technol. Process. V Proc. SPIE 920, 42-50, 1988

    被引用文献1件

  • <no title>

    FRECHET J. M. J.

    Polymers in Microlithography : Materials and Processes, 1989

    被引用文献1件

  • <no title>

    ITO H.

    Polym. Mater. Sci. Eng. 61, 427-431, 1989

    被引用文献1件

  • <no title>

    STOVER H. D. H.

    Macromolecules 24(8), 1746-1745, 1991

    被引用文献1件

  • <no title>

    FRECHET J. M. J.

    Polymers in Microlithography : Materials and Processes, 1989

    被引用文献1件

  • <no title>

    THACKERAY J. W.

    Adv. Resist Technol. Process. VI Proc. SPIE 1086, 34-47, 1989

    被引用文献1件

  • <no title>

    THACKERAY J. W.

    Adv. Resist Technol. Process. VIII Proc. SPIE 1466, 39-52, 1991

    被引用文献1件

  • <no title>

    BERRY A. K.

    Polymers in Microlithography : Materials and Processes, 1989

    被引用文献1件

  • <no title>

    WALLRAFF G. M.

    J. Vac. Sci. Technol. B 11(6), 2783-2788, 1993

    被引用文献1件

  • <no title>

    YAMASHITA K.

    J. Vac. Sci. Technol. B 11(6), 2692-2696, 1993

    被引用文献1件

  • <no title>

    REICHMANIS E.

    Acc. Chem. Res. 32(8), 659-667, 1999

    被引用文献1件

  • <no title>

    BRAINARD R. L.

    Microelectro. Eng. 61-62, 707-715, 2002

    被引用文献1件

  • <no title>

    FEIRING A. E.

    J. Fluorine Chem. 122, 11-16, 2003

    被引用文献1件

  • <no title>

    KAWATSURA K.

    Houshasen to Sangyou 81, 32-35, 1999

    被引用文献1件

  • <no title>

    OHNO S.

    Houshasen to Sangyou 94, 57-62, 2002

    被引用文献1件

  • <no title>

    NAGAHARA S.

    Adv. Resist Technol. Process. XVII Proc. SPIE 3999, 386-394, 2000

    被引用文献1件

  • <no title>

    TAGAWA S.

    Adv. Resist Technol. Process. XVII Proc. SPIE 3999, 204-213, 2000

    被引用文献1件

  • <no title>

    BRATTON D.

    Polym. Adv. Technol. 17, 94-103, 2006

    被引用文献1件

  • <no title>

    KWON Y.

    J. Mater. Chem. 12, 53-57, 2002

    被引用文献1件

  • Cyclic Olefin Resist Polymers and Polymerizations for Improved Etch Resistance.

    Allen R.D. , Opitz J. , Ito H. , Wallow T. I. , Casmier D. V. , Larson C. E. , Sooriyakumaran R. , Hofer D. C. , Varanasi P. R.

    Journal of Photopolymer Science and Technology 12(3), 501-507, 1999

    J-STAGE 被引用文献1件

  • Lithography Based on Molecular Glasses

    Tsuchiya Kousuke , Chang Seung Wook , Felix Nelson M. , Ueda Mitsuru , Ober Christopher K.

    Journal of Photopolymer Science and Technology 18(3), 431-434, 2005

    J-STAGE 被引用文献1件

  • Positive Resists Based on Non-polymeric Macromolecules

    Sooriyakumaran Ratnam , Truong Hoa , Sundberg Linda , Morris Mark , Hinsberg Bill , Ito Hiroshi , Allen Robert , Huang Wu-Song , Goldfarb Dario , Burns Sean , Pfeiffer Dirk

    Journal of Photopolymer Science and Technology 18(3), 425-429, 2005

    J-STAGE 被引用文献1件

  • <no title>

    DERBYSHIRE K.

    Solid State Technol 40, 133-138, 1997

    被引用文献1件

  • <no title>

    FRECHET J. M. J.

    Polymer 24, 995-1000, 1983

    被引用文献1件

  • <no title>

    ITO H.

    Adv. Polym. Sci. 172, 37, 2005

    被引用文献6件

  • <no title>

    ITO H.

    J. Polym. Sci. Part A : Polym. Chem. 41(24), 3863-3870, 2003

    被引用文献2件

  • <no title>

    FURUTA A.

    J. Photopolym. Sci. Technol. 2(3), 383-390, 1989

    被引用文献2件

  • <no title>

    NAKAYAMA T.

    J. Mater. Chem. 9, 697-702, 1999

    被引用文献2件

  • <no title>

    TANIGAKI K.

    J. Vac. Sci. Technol. B 6(1), 91-94, 1988

    被引用文献1件

  • <no title>

    SCHLESINGER S. I.

    Polym. Eng. Sci. 14(7), 513-515, 1974

    被引用文献1件

  • <no title>

    SCHLESINGER S. I.

    Photogr. Sci. Eng. 18(4), 387-393, 1974

    被引用文献1件

  • <no title>

    CRIVELLO J. V.

    J. Polym. Sci. Polym. Chem. Ed. 21, 1785-1799, 1983

    被引用文献1件

  • <no title>

    CRIVELLO J. V.

    J. Radiat. Curing 10(1), 6-13, 1983

    被引用文献1件

  • <no title>

    RAJARAMAN S. K.

    Macromolecules 32, 36-47, 1999

    被引用文献1件

  • <no title>

    CRIVELLO J. V.

    J. Polym. Sci. Polym. Chem. Ed. 22, 2105-2121, 1984

    被引用文献1件

  • <no title>

    CRIVELLO J. V.

    Macromolecules 10(6), 1307-1315, 1977

    被引用文献5件

  • <no title>

    CRIVELLO J. V.

    J. Polym. Sci. Polym. Chem. Ed. 17, 3845-3858, 1979

    被引用文献1件

  • <no title>

    CRIVELLO J. V.

    J. Polym. Sci. Polym. Chem. Ed. 17, 977-999, 1979

    被引用文献3件

  • <no title>

    AKHTAR S. R.

    J. Org. Chem. 55, 4222-4225, 1990

    被引用文献1件

  • <no title>

    CRIVELLO J. V.

    J. Org. Chem. 43, 3055-3058, 1978

    被引用文献3件

  • <no title>

    CRIVELLO J. V.

    J. Polym. Sci. Polym. Chem. Ed. 18, 1021-1034, 1980

    被引用文献1件

  • <no title>

    DEKTAR J. L.

    J. Org. Chem. 55, 639, 1990

    被引用文献7件

  • <no title>

    DEKTAR J. L.

    J. Org. Chem. 56, 1838-1844, 1991

    被引用文献1件

  • <no title>

    HACKER N. P.

    J. Org. Chem. 56, 2280-2282, 1991

    被引用文献1件

  • <no title>

    DEKTAR J. L.

    J. Chem. Soc. Chem. Commun. 20, 1591-1592, 1987

    被引用文献1件

  • <no title>

    DEKTAR J. L.

    J. Am. Chem. Soc. 112, 6004, 1990

    被引用文献6件

  • <no title>

    HACKER N. P.

    Macromolecules 24, 2137-2139, 1991

    被引用文献2件

  • <no title>

    HOULIHAN F. M.

    Macromolecules 21, 2001-2006, 1988

    被引用文献3件

  • <no title>

    HOULIHAN F. M.

    J. Photopolym. Sci. Technol. 3(3), 259-273, 1990

    被引用文献1件

  • <no title>

    NEENAN T. X.

    Macromolecules 23, 145-150, 1990

    被引用文献3件

  • <no title>

    NEENAN T. X.

    J. Photopolym. Sci. Technol. 4(3), 341-355, 1991

    被引用文献1件

  • <no title>

    HOULIHAN F. M.

    Chem. Mater. 3, 462-471, 1991

    被引用文献1件

  • <no title>

    SCHLEGEL L.

    Chem. Mater. 2(3), 299-305, 1990

    被引用文献1件

  • <no title>

    UENO T.

    Polym. Eng. Sci. 32(20), 1511-1515, 1992

    被引用文献2件

  • <no title>

    BARCLAY G. G.

    Chem. Mater. 7(7), 1315-1324, 1995

    被引用文献2件

  • <no title>

    BOHLAND J. F.

    J. Photopolym. Sci. Technol. 3(3), 355-373, 1990

    被引用文献1件

  • <no title>

    POHLERS G.

    Chem. Mater. 9(6), 1353-1361, 1997

    被引用文献1件

  • <no title>

    AOAI T.

    J. Photopolym. Sci. Technol. 3(3), 389-400, 1990

    被引用文献2件

  • <no title>

    HOULIHAN F.

    Can. J. Chem. 63, 153-162, 1985

    被引用文献2件

  • <no title>

    MOON S.

    Chem. Mater. 5(9), 1315-1320, 1993

    被引用文献2件

  • <no title>

    HAYASHI N.

    Polymer 33(8), 1583-1588, 1992

    被引用文献1件

  • <no title>

    HESP S. A. M.

    J. Appl. Polym. Sci. 42, 877-883, 1991

    被引用文献2件

  • <no title>

    PAWLOWSKI G.

    J. Photopolym. Sci. Technol. 5(1), 55-66, 1992

    被引用文献1件

  • <no title>

    PADMANABAN M.

    J. Photopolym. Sci. Technol. 7(3), 461-472, 1994

    被引用文献1件

  • Recent Advances in Acetal-Based DUV Resists

    Malik Sanjay , Blakeney Andrew J. , Ferreira Lawrence

    Journal of Photopolymer Science and Technology 12(4), 591-599, 1999

    被引用文献1件

  • <no title>

    TARASCON R. G.

    Polym. Eng. Sci. 29(13), 850-855, 1989

    被引用文献1件

  • <no title>

    YAMAOKA T.

    Polym. Eng. Sci. 29(13), 856-858, 1989

    被引用文献1件

  • <no title>

    O'BRIEN M. J.

    Polym. Eng. Sci. 29(13), 846-849, 1989

    被引用文献1件

  • 1 / 2

各種コード

  • NII論文ID(NAID)
    10021992943
  • NII書誌ID(NCID)
    AA11467302
  • 本文言語コード
    ENG
  • 資料種別
    REV
  • ISSN
    13895567
  • データ提供元
    CJP書誌 
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