Highly Manufacturable 64M bit Ultra Low Power SRAM Using a Novel 3-Dimensional S^3 (Stacked Single-crystal Si) Cell Technology

• CHO W. S

  Advanced Technology Development Team, Semiconductor R&D Center, Memory Division Samsung Electronics Co.

• LIM H.

  Advanced Technology Development Team, Semiconductor R&D Center, Memory Division Samsung Electronics Co.

• JANG J. H.

  Advanced Technology Development Team, Semiconductor R&D Center, Memory Division Samsung Electronics Co.

• KANG Y. H.

  Advanced Technology Development Team, Semiconductor R&D Center, Memory Division Samsung Electronics Co.

• MOON J. H.

  Advanced Technology Development Team, Semiconductor R&D Center, Memory Division Samsung Electronics Co.

• YEO C. D.

  Advanced Technology Development Team, Semiconductor R&D Center, Memory Division Samsung Electronics Co.

• KWAK K. H.

  Advanced Technology Development Team, Semiconductor R&D Center, Memory Division Samsung Electronics Co.

• CHOI B. H.

  Advanced Technology Development Team, Semiconductor R&D Center, Memory Division Samsung Electronics Co.

• HWANG B. J.

  Advanced Technology Development Team, Semiconductor R&D Center, Memory Division Samsung Electronics Co.

• JUNG W. R.

  Advanced Technology Development Team, Semiconductor R&D Center, Memory Division Samsung Electronics Co.

• KIM S. J.

  Advanced Technology Development Team, Semiconductor R&D Center, Memory Division Samsung Electronics Co.

• KIM J. H.

  Advanced Technology Development Team, Semiconductor R&D Center, Memory Division Samsung Electronics Co.

• NA J. H.

  Advanced Technology Development Team, Semiconductor R&D Center, Memory Division Samsung Electronics Co.

• JEONG J. H.

  Advanced Technology Development Team, Semiconductor R&D Center, Memory Division Samsung Electronics Co.

• JUNG S. M.

  Advanced Technology Development Team, Semiconductor R&D Center, Memory Division Samsung Electronics Co.

• KIM Kinam

  Advanced Technology Development Team, Semiconductor R&D Center, Memory Division Samsung Electronics Co.

収録刊行物

• Extended abstracts of the ... Conference on Solid State Devices and Materials

  Extended abstracts of the ... Conference on Solid State Devices and Materials 2004 190-191, 2004-09-15

詳細情報

• CRID: 1573105975448673152
• NII論文ID: 10022538168
• NII書誌ID: AA10777858
• 本文言語コード: en
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