Gate Overlapped Raised Extension Structure (GORES) MOSFET by Using In-situ Doped Selective Si Epitaxy

  • TATESHITA Y.
    Semiconductor Technology Development Group, Semiconductor Solutions Network Company, Sony Corporation Atsugi Tec.
  • IMOTO T.
    Semiconductor Technology Development Group, Semiconductor Solutions Network Company, Sony Corporation Atsugi Tec.
  • KIKUCHI Y.
    Semiconductor Technology Development Group, Semiconductor Solutions Network Company, Sony Corporation Atsugi Tec.
  • WANG J.
    Semiconductor Technology Development Group, Semiconductor Solutions Network Company, Sony Corporation Atsugi Tec.
  • KATAOKA T.
    Semiconductor Technology Development Group, Semiconductor Solutions Network Company, Sony Corporation Atsugi Tec.
  • MIYANAMI Y.
    Semiconductor Technology Development Group, Semiconductor Solutions Network Company, Sony Corporation Atsugi Tec.
  • IKEDA H.
    Semiconductor Technology Development Group, Semiconductor Solutions Network Company, Sony Corporation Atsugi Tec.
  • FUJITA S.
    Semiconductor Technology Development Group, Semiconductor Solutions Network Company, Sony Corporation Atsugi Tec.
  • LANDIN T.
    ASM America Inc.
  • ARENA C.
    ASM America Inc.
  • IWAMOTO H.
    Semiconductor Technology Development Group, Semiconductor Solutions Network Company, Sony Corporation Atsugi Tec.
  • OHNO T.
    Semiconductor Technology Development Group, Semiconductor Solutions Network Company, Sony Corporation Atsugi Tec.
  • KOBAYASHI T.
    Semiconductor Technology Development Group, Semiconductor Solutions Network Company, Sony Corporation Atsugi Tec.
  • SAITO M.
    Semiconductor Technology Development Group, Semiconductor Solutions Network Company, Sony Corporation Atsugi Tec.
  • KADOMURA S.
    Semiconductor Technology Development Group, Semiconductor Solutions Network Company, Sony Corporation Atsugi Tec.
  • NAGASHIMA N.
    Semiconductor Technology Development Group, Semiconductor Solutions Network Company, Sony Corporation Atsugi Tec.

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詳細情報 詳細情報について

  • CRID
    1570572700671913600
  • NII論文ID
    10022543613
  • NII書誌ID
    AA10777858
  • 本文言語コード
    en
  • データソース種別
    • CiNii Articles

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