Optimization of Hafnium Zirconate (HfZrO_x) Gate Dielectric for Device Performance and Reliability

• HEGDE R. I.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• TRIYOSO D. H.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• KALPAT S.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• SAMAVEDAM S. B.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• SCHAEFFER J. K.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• LUCKOWSKI E.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• CAPASSO C.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• GILMER D. C.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• RAYMOND M.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• ROAN D.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• NGUYEN J.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• LA L.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• HEBERT E.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• WANG X-D.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• GREGORY R.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• RAI R. S.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• JIANG J.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• LUO T. Y.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

• WHITE B. E. Jr.

  Freescale Semiconductor, Inc., Austin Silicon Technology Solutions (ASTS)

収録刊行物

• Extended abstracts of the ... Conference on Solid State Devices and Materials

  Extended abstracts of the ... Conference on Solid State Devices and Materials 2006 1098-1099, 2006-09-13

詳細情報

• CRID: 1570572700671577344
• NII論文ID: 10022547730
• NII書誌ID: AA10777858
• 本文言語コード: en
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