New Observation of NBTI Degradation and Recovery Effect of Plasma Nitrided Oxide in Nano Scale PMOSFET's

• HAN In-Shik

  Dept. of Electronics Engineering, Chungnam National University

• JI Hee-Hwan

  Magnachip Semiconductor Inc.

• GOO Tae-Gyu

  Dept. of Electronics Engineering, Chungnam National University

• YOU Ook-Sang

  Dept. of Electronics Engineering, Chungnam National University

• CHOI Won-Ho

  Dept. of Electronics Engineering, Chungnam National University

• NA Min-Ki

  Dept. of Electronics Engineering, Chungnam National University

• LEE Ga-Won

  Dept. of Electronics Engineering, Chungnam National University

• KIM Yong-Goo

  Magnachip Semiconductor Inc.

• PARK Sung-Hyung

  Magnachip Semiconductor Inc.

• LEE Heui-Seung

  Magnachip Semiconductor Inc.

• KANG Young-Seok

  Magnachip Semiconductor Inc.

• KIM Dae-Byung

  Magnachip Semiconductor Inc.

• LEE Hi-Deok

  Dept. of Electronics Engineering, Chungnam National University

収録刊行物

• Extended abstracts of the ... Conference on Solid State Devices and Materials

  Extended abstracts of the ... Conference on Solid State Devices and Materials 2007 432-433, 2007-09-19

詳細情報

• CRID: 1570854175648352640
• NII論文ID: 10022549382
• NII書誌ID: AA10777858
• 本文言語コード: en
• データソース種別:
  • CiNii Articles